Recent Advances in Silicon Microphotonic Devices

P. Cheben; A. Delâge; A. Densmore; S. Janz; B. Lamontagne; J. Lapointe; E. Post; J. Schmid; P. Waldron; D. -X. Xu

P. Cheben Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
A. Delâge Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
A. Densmore Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
S. Janz Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
B. Lamontagne Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
J. Lapointe Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
E. Post Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
J. Schmid Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
P. Waldron Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada
D. -X. Xu Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada

Abstract

Various microphotonic silicon-on-insulator (SOI) waveguide devices developed at the National Research Council of Canada are reviewed. These include a high-resolution arrayed waveguide grating (AWG) spectrometer, a Fourier-transform interleaved AWG spectrometer with a large light gathering capability, and an AWG with the dispersion enhancement using the photonic bandgap effect. Sub-wavelength grating (SWG) structures are introduced, including input couplers and antireflective waveguide facets.